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M.Sc. Microsystems Engineering

Degree awarded
Master of Science

University of Freiburg, Faculty of Engineering, Georges-Koehler-Allee 101, 79110 Freiburg, Germany

+49 (0)761 203 8340

E-mail address

Type of course

Language of tuition

Length of course
2 years

Date of commencement

Application deadline
EU-citizens: 15th July
Non EU-citizens: 31st May

Class size

Cost / fees
EU-citizens: 180 Euro per semester
Non EU-citizens: 1680 Euro per semester

Student grants / Financial assistance
Applicants with excellent GPA can apply for the Germany scholarship

Students will stay in student residences or shared flats.

Major recruiters of graduates of our programmes
Siemens, Bosch, Sick, Infineon and more

Exchange partner schools
Partner universities in Europe
Partner universities outside the European Union

Student profile
1. 89% international students
2. Ratio Men/Women: Men 73 % Women 27 %
3. Age Range: 23 – 27 years
4. Average Age: 25.6

Admission requirements
Bachelor's degree in mechatronics, electrical, electronics, or mechanical engineering, or in a closely related study field, previous knowledge in mathematics, chemistry, physics, electronics, electrical and mechanical engineering and materials, excellent GPA, TOEFL (iBT 95) or IELTS Band 7.0

Programme Director
Prof. Bastian Rapp

Contact person for application
Ursula Epe

University of Freiburg

Master's program in Microsystems Engineering (M.Sc.)

Microsystems engineering is the engineering discipline with the broadest focus: elements from mathematics, physics, chemistry, electrical engineering and materials science form the cornerstones of exciting innovations.

The products developed by the automobile industry, medical services, communications and energy are becoming ever smaller, more powerful, smarter, more connected and more independent.

Often, however, the sensors and systems that are in these everyday objects are so miniaturized that they are nearly invisible. That is precisely the reason they have taken a foothold in most industries.

The Master's programme in Microsystems Engineering is designed for highly qualified graduate students holding a Bachelor's degree in electrical or mechanical engineering, electronics or mechatronics and who want to specialise in this exciting engineering discipline.

The curriculum

MSE is an interdisciplinary programme and students come from many different backgrounds. In the first year they complete the following mandatory courses in order to acquire a basic knowledge in all areas of microsystems engineering:
  • Microelectronics
  • Micromechanics
  • MST Design Lab
  • MST Technologies and Processes
  • Signal Processing
In the compulsory elective area “Advanced Microsystems”, students have to complete five of the following modules:
  • Assembly and Packaging Technology
  • Biomedical Microsystems
  • Micro-actuators
  • Micro-fluidics
  • Micro-optics
  • Modeling and System Identification
  • Probability and Statistics
  • Sensors
In the second-year students can specialise in one of the following concentration areas:
  • Biomedical Engineering
  • Circuits and Systems
  • Materials and Fabrication
  • Photonics
Essential for the successful completion of the Master’s degree is submission of a Master’s thesis, which is based on a project performed during the third and fourth semesters of the programme. Each student works as a member of one of the 21 research groups of the department, with full access to laboratory and cleanroom infrastructure.

This programme is given in English. Our faculty members as well as our students come from all over the world and create an international atmosphere on-campus.

About the Department of Microsystems Engineering (IMTEK)

The Department of Microsystems Engineering (IMTEK) is unique in Europe. Its scientific scope, with currently 24 professors and over 300 research and technical staff, encompasses nearly all technical fields relevant to the world of microsystems, focusing in particular on smart systems integration, lab-on-a-chip and medical MEMS engineering materials, surfaces and processes as well as optical systems. Situated on a new campus, IMTEK features modern facilities including a cleanroom, electronics, optics, chemistry and robotics laboratories and computer pools for students.

Other courses offered by University of Freiburg

About the University of Freiburg

The University of Freiburg was founded in 1457 as a classical comprehensive university, making it one of the most renowned institutions of higher education in Germany.

The 2024 Times Higher Education Ranking has ranked the University of Freiburg 11th in Germany.

The structure of the university is multifaceted, ranging from 11 academic faculties - from the humanities and the social and natural sciences all the way to engineering to 20 research centres. This goes to show that we are a dynamic, large-scale institution with a diverse educational offering. Bilateral partnerships, research projects, joint study courses and memberships in international networks such as the League of European Research Universities (LERU) and the European Confederation of Upper Rhine Universities (EUCOR) are examples of the university's strong transnational relations.

All our students, including those from abroad, can take courses at the Universities of Basel (Switzerland) and Strasbourg (France) without having to enrol. Via the EUCOR mobility grant, they also receive allowances for travel expenses.