The European Education Directory
Home Degree Course Search Education Systems Contact

M.Sc. Microsystems Engineering

University of Freiburg, Faculty of Engineering, Georges-Koehler-Allee 101, 79110 Freiburg, Germany

+49 (0)761 203 8340

E-mail address

Type of course

Language of tuition

Length of course
2 years

Date of commencement
October (application deadline for EU-citizens June 1, non EU-citizens May 1)

Class size

EU-citizens: 155 Euro per semester
Non EU-citizens: 1655 Euro per semester

Student grants / Financial assistance
Part funding offered to outstanding applicants

In the first semester international students will receive a room in the students’ residences

Major recruiters of graduates of our programmes
Siemens, Bosch, Sick, Infineon and more

Exchange partner schools
College of Engineering, University of Michigan / USA, Kyoto University, Kyoto, Graduate School of Engineering (and others)

Student profile
1. 95% international students
Ratio Men/Women: Men 72 % Women 28 %
3. Age Range: 23 – 27 years
4. Average Age: 25.5

Admission requirements
Bachelor’s degree in Science or Engineering with an excellent GPA, TOEFL (iBT 92-93) or IELTS Band 6.5, GRE

Programme Director
Prof. Moritz Diehl

Contact person for application
Ursula Epe

University of Freiburg

Master's program in Microsystems Engineering

Microsystems, MEMS or micromachines: many names for an exciting and dynamic engineering discipline which combines expertise from areas as diverse as electrical engineering, biology, manufacturing technology and chemistry and thus allows engineers to conceive highly miniaturized, multi-functional systems used for medical and diagnostic purposes, in communication and information systems as well as in the automotive industry.

The Master's program in Microsystems Engineering is designed for highly qualified graduate students holding a Bachelor's degree in engineering or science. The MSc. in Microsystems Engineering (MSE) provides the educational basis for your success in this highly innovative field.

MSE is a very versatile program. It comprises not only microelectronics, but also micromechanics, optical microsystems, micro-actuators, micro-fluidics, biomedical microsystems and technologies for their fabrication. Although from the third semester on you can specialize in two of seven concentration areas, in the first year you will have compulsory courses in all areas which play a role for microsystems engineering.

Concentrations are offered in the areas of:

* Circuits and systems
* Design and simulation
* Life sciences: Biomedical engineering
* Life sciences: Lab-on-a-chip
* Materials
* Photonics
* Process engineering
* Sensors and actuators

Essential for the successful completion of the Master’s degree is submission of a Master’s thesis, which is based on a project performed during the third and fourth semesters of the program. Each student works as a member of one of the 21 research groups of the department, with full access to laboratory and cleanroom infrastructure.

This program is given in English. Our faculty members as well as our students come from all over the world and create an international atmosphere on-campus.

About the Department of Microsystems Engineering (IMTEK)

The Department of Microsystems Engineering (IMTEK) is unique in Europe. Its scientific scope, with currently 23 professors and over 300 research and technical staff, encompasses nearly all technical fields relevant to the world of microsystems, focusing in particular on energy autonomous microsystems, intelligent systems, lab-on-a-chip and biomedical microsystems, intelligent materials, surfaces and processes as well as optical systems. Situated on a new campus, IMTEK features modern facilities including a cleanroom, electronics, optics, chemistry and robotics laboratories and computer pools for students.

Other courses offered by University of Freiburg

  • M.Sc. Applied Computer Science
  • M.Sc. Embedded Systems Engineering
  • M.Sc. Sustainable Systems Engineering

  • About the University of Freiburg

    The University of Freiburg is one of the oldest and most renowned higher education institutions in Germany with a long tradition in the humanities, social sciences, and natural sciences/medicine. It is listed among the best German universities according to the latest Academic Ranking of World Universities (ARWU). Besides its excellence in research and teaching, the scholarly diversity is above all what attracts so many students to Freiburg`s Alma Mater. The University of Freiburg consists of 11 Faculties, which offer degree programs in theology, mathematics, physics, biology, chemistry, pharmacy, geo sciences, forestry, computer science and microsystems engineering. The university library holds more than two million volumes as well as multimedia facilities and is open 24/7. All students have the opportunity to join the General University Sports Association, which offers 35 different kinds of sports.

    With 30,000 students, Freiburg is clearly a college town. The relaxed and friendly atmosphere coupled with the large spectrum of cultural offerings has made Freiburg one of the most attractive destinations for students.